電子背向繞射儀

Electron Back Scattered Diffraction (EBSD)

電子背散射繞射系統(EBSD, Electron Back Scattered Diffraction)共兩套系統，一套裝設於SEM 6400 (OXFORD OPAL)，另一套為高解析多相式電子背散射繞射系統 (EBSD analyzer HKL CHANNEL 5 EBSD system)裝設於FEG-SEM 6330，結合電腦軟體可以在SEM顯微組織影像得到材料的晶體結構、結晶取向、微區織構、晶粒尺寸、晶粒形狀及分佈、晶界性質等晶體結晶學多方面的資訊。由於多晶材料中每個晶粒都有不同的方位，因此對每顆晶粒作EBSD就會得到不同的電子背散射繞射圖形 (EBSP, Electron Back Scattered Pattern)圖形，便可以獲得該材料微區域的結晶取向。因此，EBSD分析技術可以在SEM中同時將SEM的顯微組織影像與結晶學分析作連結，非常適合應用在金屬或陶瓷等多晶材料方面的研究。

Electron back scattered diffraction (EBSD) consists of two systems: one is installed in SEM 6400 (OXFORD OPAL) and another is installed in FEG-SEM 6330 (EBSD analyzer HKL CHANNEL 5 EBSD system). Combined with computer software, EBSD can be employed to analyze the crystalline information of the samples under the observation of SEM microstructure. There are several kinds of useful information generated by the EBSD analytic technique, such as crystalline structure, crystalline orientation, microtexture, gain size, grain shape and distribution, as well as grain boundary properties. Different grain orientations in polycrystalline materials will contribute different electron back scattered patterns (EBSP) and, thus, the crystalline orientation of the samples will be analyzed. Therefore, EBSD analytic technique can combine the SEM microstructure and crystallography analysis, and it is very suitable to be used to analyze the crystallography of metals and ceramics.